Robotic Cell for FSI Mercury Loading Automation
FSI Mercury Machine Automation
Precise, clean and fully automated, discover the FSI SmartCell robotic cell that automates the loading of your FSI Mercury machines by providing :
- Handling of semiconductor wafers (foups/pods),
- Balancing of the washing trays by handling the wafers plate by plate,
- Management of cleaning recipes,
Thanks to this unique manipulator you will be able to :
- Optimize the line throughput,
- Reduce the drudgery of operator tasks,
- Ensure the high requirements in terms of traceability.
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