Mobile Robot for Wafer Handling

Handling of Pods / Foups for the Semiconductor Industry

It is an automated robot for the transport of wafer bundles and pods for the semiconductor industry. It is indispensable in areas where OHT (Overhead Hoist Transport) systems cannot be integrated. It improves the efficiency of automated transport (AMHS).

Made by:

This COMOBOT can be fully integrated with the communication standards in the production lines: SECS/GEM/E84.

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