Mobile Robot for Wafer Handling
Handling of Pods / Foups for the Semiconductor Industry
It is an automated robot for the transport of wafer bundles and pods for the semiconductor industry. It is indispensable in areas where OHT (Overhead Hoist Transport) systems cannot be integrated. It improves the efficiency of automated transport (AMHS).
This COMOBOT can be fully integrated with the communication standards in the production lines: SECS/GEM/E84.
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