Quality control of Pods and Foups

Quality control of Pods and Foups

For automated quality control of pods/foops, get quality control systems designed by ATG Technologies. Discover our solutions designed to fit your semiconductor manufacturing process (200mm or 300mm Fabs).

Advantages of quality control systems

The machine developed by ATG Technologies automates the inspection of transport boxes and baskets. Quality control systems for pods/foups offer the following advantages:

  • Optimisation of workstation ergonomics ;
  • Reduced musculoskeletal disorders;
  • More reliable handling;
  • Optimised process traceability;
  • Reduced particulate input.

Applications for pods/foups quality control systems

There are several applications for pod/foup quality control systems:

Case 1: Quality control of pods

Foups and pods are in constant contact with wafers. It is therefore essential to check their physical integrity before using them in a new manufacturing cycle. The aim is to ensure their physical integrity.

Case 2: Quality control of wafers

The quality control system is used to check the integrity of foups and pods before they are reused in a new manufacturing cycle. It has a number of features:

  • The system is fed by the OHTs;
  • Opening of the basket by the robot;
  • On-board camera mounted on the robot arm;
  • The robot’s movements are synchronised with the rotary loadports to ensure that all sides are accessible.

MGA Technologies Group, a passion for technology

ATG Technologies specialises in robotics and control engineering. For over 20 years, ATG Technologies has been designing and producing innovative solutions for automation and production control in industry. It offers turnkey solutions, from the preliminary project, through design and production, to the implementation of robotic solutions. Based in Avignon, its premises cover 700 m², most of which is taken up by the workshop dedicated to the design and manufacture of process machines, custom machines, assembly lines and testing machines designed for the medical, biotechnology, pharmaceutical and high-tech industries.

ATG Technologies is a subsidiary of MGA Technologies, which has been designing and producing special custom machines for over 40 years for a wide range of industrial sectors including pharmaceutical, biotechnology, medical, food, watchmaking, electrical and electronic components. The group brings together a team of people with a passion for technology and techniques: mechatronics, mechanics, automation, robotics and artificial intelligence. A key player in the industry of the future, MGA Technologies has dedicated a department to innovation and R&D, the MGA TechLab 4.0.

Need more information about our pod/whoop quality control systems? Don’t hesitate to contact us via our contact form on this page.

 

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